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|
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| Unit Price |
$ 320,000.00 |
| Number of Units |
1 |
| Manufacturer | Nikon |
| Model | NSR 2005i10C |
| Wafer Size Range |  |
 | | Minimum | 150 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Wafer Handler Size Range |  |
 | | Minimum | 150 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Wafer Handling | Standard Robot |
| Controller Type | Other Controller Type |
| Interfaced to PR Track | YES |
| Interface Type | TEL,RHS |
| Environmental Enclosure Provided | YES |
| Accessories | FIA-Alignment
Prealignment 2
Level 2 Stage Ball-Leadscrew
3-Blade shutter upgrade
Down-Transformer 3x 440/415/380VAC > 3x 200VAC
|
| Other Information | Tool is wrapped with foil and air cushion but not crated in a wooden box
Buyer is responsible for crating cost
|
| Year of Manufacture | 1994 |
| Condition | Very Good |
| Power Requirements | 200-208 V 75.0 A 50/60 Hz 3 Phase
|
| External Cooling | Water Cooled |
| Cooling Water Required | Minimum Temperature: 16 ºC (61 ºF, 289.00 ºK) Maximum Temperature: 32 ºC (90 ºF, 305 ºK)
|
| Operating Air Pressure | 43.00 PSI (296,497.90 N/sq m) |
| Air Consumption | 0.18 CFM (0.01 cu m/min) |
| Vacuum Required | 0.01 in Hg (0.25 mm Hg) |
| Exterior Dimensions |  |
 | | Width | 101.181 in (257.0 cm) |
| Depth | 107.874 in (274.0 cm) |
| Height | 96.457 in (245.0 cm) |
| Weight | 9,480 lb (4,300 kg) |