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| Unit Price |
$ 700,000.00 |
| Number of Units |
1 |
| Manufacturer | Nikon |
| Model | NSR2005i11C |
| Wafer Size Range |  |
 | | Minimum | 150 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Wafer Handler Size Range |  |
 | | Minimum | 150 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Reticle Plate Size | 6'' x 6'' |
| Other Information | 8” notch wafer size
Wafer loader type 2
Software has been de-installed by Nikon
Down transformer included from 400 V to 208 V
25KW power
Field size variable
Inline right
|
| Year of Manufacture | 1996 |
| Condition | Very Good |
| Power Requirements | 208 V 50 Hz 3 Phase
|
| CE Marked | YES |
| Cooling Water Required | Minimum Flow: 30.00 GPM (114.02 l/m) Minimum Temperature: 16 ºC (61 ºF, 289.00 ºK) Maximum Temperature: 32 ºC (90 ºF, 305 ºK)
|
| Air Consumption | 51.00 CFM (1.44 cu m/min) |
| Exterior Dimensions |  |
 | | Width | 70.866 in (180.0 cm) |
| Depth | 98.031 in (249.0 cm) |
| Height | 96.457 in (245.0 cm) |
| Weight | 11,243 lb (5,100 kg) |