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|
 |
| Unit Price |
$ 30,000.00 |
| Number of Units |
1 |
| Manufacturer | IPEC/Speedfam |
| Model | Avanti 472 |
| Wafer Size Range |  |
 | | Set Size | 200 mm |
| Number of Platens | 2 |
| Platen Diameter | 20.00 in (50.80 cm) |
| Recirculating Chiller |  |
 | | Chiller Included | YES |
| Chiller Model | Unknown |
| Other Information | Pad Conditioning - APP1000
Controller Type - Integrated
|
| Year of Manufacture | 1997 |
| Condition | Very Good |
| Power Requirements | 208 V 75.0 A 50 Hz 3 Phase
|
| Cooling Water Required | Minimum Flow: 5.00 GPM (19.00 l/m) Minimum Temperature: 0 ºC (32 ºF, 273.00 ºK) Maximum Temperature: 0 ºC (32 ºF, 273 ºK)
|
| Operating Air Pressure | 90.00 PSI (620,577.00 N/sq m) |
| Air Consumption | 6.00 CFM (0.17 cu m/min) |
| Vacuum Required | -20.00 in Hg (-507.99 mm Hg) |
| Exterior Dimensions |  |
 | | Width | 207.600 in (527.3 cm) |
| Depth | 131.700 in (334.5 cm) |
| Height | 92.000 in (233.7 cm) |
| Weight | 7,500 lb (3,402 kg) |